Glass & silicon wafers for making pressure sensors

Glass & silicon wafers for making pressure sensors

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Credit: JAMES HOLMES/FULMER RESEARCH/SCIENCE PHOTO LIBRARY

Caption: Glass & silicon wafers used in the manufacture of ultra-sensitive pressure sensors. The wafers will be bonded together to form around 200 tiny sensors, each one composed of a layer of glass & a layer of silicon, with a tiny vacuum-filled chamber sandwiched between them. One terminal of the sensor is connected to the silicon & the other to a metal electrode bonded to the glass floor of the chamber. Changes in pressure alter the chamber height & hence the electrical capacitance of the device, allowing it to be calibrated to measure pressure. The sensor is a mechanical device & does not contain integrated circuits or transistors.

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Keywords: electronic, electronics, manufacture, non-integrated, pressure sensor, silicon pressure sensor, technology equipment

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