X-ray lithography research. Equipment for experimental manufacture of integrated circuits using X-ray photolithography. Photolithography involves projecting the pattern of the desired circuit onto specially-treated silicon wafers, usually with ultraviolet (UV) light. Exposure to the light causes a photosensitive chemical layer (photoresist) to become either less or more stable (positive or negative resist). The surface of the silicon is then exposed to chemical etching, creating the desired pattern. Because X-rays have a shorter wavelength, they could potentially be used to etch smaller features on chips. Photographed at IMT Berlin, Germany.
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