LM of micro-resonator

LM of micro-resonator

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Caption: Light micrograph of a micro- resonator. A micro- resonator is a mechanical resonator structure, made by the same silicon deposition process used in the manufacture of microcircuits. To the left of the frame is the resonant mass, with the tooth- like sensor structure at right. Once motion has been electrically induced, the resonator oscillates much in the same way as a pendulum, only at around 10,000 times per second. The resonant mass of the structure is about 700 nanometres long and about 300 nanometres wide. Such resonators may be used in a variety of motion monitoring devices.

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Keywords: light micrograph, mechanical, micro, micromech, micromechanical, micromechanics, microresonator, nano, nanotechnology, semaphore structure, technology

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