SEM of microresonator with mite (Acarimetaseiulus)

SEM of microresonator with mite (Acarimetaseiulus)

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Credit: PETER MENZEL/SCIENCE PHOTO LIBRARY

Caption: Scanning electron micrograph (SEM) of a mite (Acarimetaseiulus occidentalis) on the surface of a silicon micro-resonator 'chip'. The micro- resonator, or 'semaphore structure', is a product of micromechanics, where mechanical devices are manufactured by successive deposition of thin layers of silicon. Such micro-resonators are used to make tiny vibration sensors. Only the comb-like detector end of the micro-resonator is seen here, the thin strand of silicon running out of frame in the top left is attatched to a large resonant mass. To give an idea of scale, the silicon strand is 2 microns thick and 2 microns wide.

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Keywords: acarimetaseiulus, acarimetaseiulus occidentalis, mechanical, micro, micro-resonator, micromechanical, micromechanics, mite, nano, nanotechnology, on silicon chip, technology, type

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