Scientist holding silicon wafer

Scientist holding silicon wafer

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Caption: A scientist at the University of California's micromechanics laboratory holding a silicon wafer containing several gas flow sensors. The sensors are made by the new technology of micromechanics, where a mechanical device is made using silicon deposition techniques similar to those used in microcircuit manufacture. The very high degree of miniaturisation that is available means that these gas flow sensors may be located in very confined spaces, or may detect very small flows.

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Keywords: gas flow, gas flow sensor, mechanical, micro, micromechanic, micromechanical, micromechanics, microsensor, nano, nanotechnology, technology

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