Micromechanics test structures

Micromechanics test structures

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Credit: MANFRED KAGE/SCIENCE PHOTO LIBRARY

Caption: False-colour scanning electron micrograph of silicon micromechanics test structures. These structures were made to test the accuracy and repeatability of micromanufacturing processes. These use selective deposition techniques, similar to those used to make microelectronics components. Magnification x210 at 6x7cm size.

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Keywords: mechanical, micro, micromechanical, micromechanics, microstructures, nano, nanotechnology, silicon microstructures, technology

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