Micromechanic pump components

Micromechanic pump components

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Credit: MANFRED KAGE/SCIENCE PHOTO LIBRARY

Caption: Micromechanic pump. Light micrograph of components of a micromechanic pump. These were made using similar techniques to those employed in integrated circuit (silicon chip) manufacture. At these small scales, silicon is as good a material as steel for mechanical systems, but is far easier to shape. Magnification x40 at 6x7cm size.

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Keywords: mechanical, micro, micromechanic, micromechanical, micromechanics, nano, nanotechnology, pump, technology

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