Microgyrometer

Microgyrometer

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Credit: COLIN CUTHBERT/SCIENCE PHOTO LIBRARY

Caption: Microgyrometer. Coloured scanning electron micrograph (SEM) of a microgyrometer. This 1mm diameter microelectromechanical system (MEMS) is used to maintain stability in vehicles or moving systems. It is made in polycrystalline silicon by deep-etching techniques. Magnification: x 46 at 6x4.5cm size. x33 at 35mm size.

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Keywords: electromechanical systems, gyrometer, mechanical, mems, micro, micromechanical, micromechanics, nano, nanotechnology, polycrystalline, scanning electron micrograph, sem, silicon, technology

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