Examining microdevice

Examining microdevice

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Caption: Examining microdevices. Sheet of microelectromech- anical systems (MEMS) being examined with an interference microscope (surface profiler). MEMS are electrical and mechanical devices with micrometre-sized parts. They include tiny robots (nanorobots), as well as miniature laboratories (labs on a chip) which can be used in sensors or diagnostic devices. The surface features of this MEMS are being found to a vertical resolution of one tenth of a nanometre using white light interferometry, the pattern caused by the interaction of two waves of white light. Photographed in the Micromechanics Lab of Newcastle University, England.

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