Weevil and MEMS device, SEM

Weevil and MEMS device, SEM

T395/0286 Rights Managed

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Credit: HUBERT RAGUET/EURELIOS/SCIENCE PHOTO LIBRARY

Caption: Weevil and MEMS device, coloured scanning electron micrograph (SEM). MEMS (microelectromechanical systems) are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to surface effects (electrostatics and wetting) dominating volume effects (inertia and thermal properties). Applications include microscopic sensors and optical display technologies. These components, etched onto silicon, are less than 2 millimetres wide. This MEMS device has been developed at the French ENSMM (Ecole Nationale Superieure de Mecanique et des Microtechniques), by Raymond Chaleat's research group.

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