MEMS microscopy, silicon plate

MEMS microscopy, silicon plate

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Credit: HUBERT RAGUET/EURELIOS/SCIENCE PHOTO LIBRARY

Caption: MEMS microscopy. Scanning electron micrograph (SEM) electrodes being used to scan a silicon plate containing MEMS (microelectromechanical systems) devices. MEMS devices are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to increased surface effects such as electrostatics and wetting. Applications include microscopic sensors and optical display technologies. Materials used to construct MEMS devices include silicon (as here) and also polymers such as plastics. Photographed at the Federal Polytechnic School of Lausanne (FPSL), Switzerland.

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