Microelectromechanical device, SEM

Microelectromechanical device, SEM

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Credit: HUBERT RAGUET/EURELIOS/SCIENCE PHOTO LIBRARY

Caption: Microelectromechanical device, coloured scanning electron micrograph (SEM). These circular components have been constructed on a piece of silicon. MEMS (microelectromechanical systems) are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to surface effects (electrostatics and wetting) dominating volume effects (inertia and thermal properties). Applications include microscopic sensors and optical display technologies.

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Keywords: 3, coloured, component, components, device, devices, electronics, false-coloured, mechanical, mechanics, mems, mems device, micro, microelectromechanical systems, micromechanical, micromechanics, scanning electron micrograph, scanning electron microscope, sem, semiconductor, sensor, sensors, silicon, technological, technology, three, trio

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