Microelectromechanical device, SEM

Microelectromechanical device, SEM

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Caption: Microelectromechanical device, coloured scanning electron micrograph (SEM). This is a sensor gauge that moves along the scale at right, from which a reading is taken. MEMS (microelectromechanical systems) are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to surface effects (electrostatics and wetting) dominating volume effects (inertia and thermal properties). Applications include microscopic sensors and optical display technologies. This silicon MEMS device has been developed at the French ENSMM (Ecole Nationale Superieure de Mecanique et des Microtechniques), by Raymond Chaleat's research group.

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