MEMS production, silicon furnace

MEMS production, silicon furnace

T395/0295

Rights Managed

Caption

MEMS production. Clean room technician removing a silicon plate from a furnace as part of the process of producing MEMS (microelectromechanical systems) devices. MEMS devices are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to increased surface effects such as electrostatics and wetting. Applications include microscopic sensors and optical display technologies. Materials used to construct MEMS devices include silicon (as here) and also polymers such as plastics. Photographed at the Federal Polytechnic School of Lausanne (FPSL), Switzerland.

Release details

Model release not available. Property release not required.

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