MEMS production, quality control

MEMS production, quality control

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Credit: HUBERT RAGUET/EURELIOS/SCIENCE PHOTO LIBRARY

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Caption: MEMS production. Clean room technician using a microscope to examine a silicon MEMS plate (circular) as part of the quality control process for manufacturing MEMS (microelectromechanical systems) devices. MEMS devices are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to increased surface effects such as electrostatics and wetting. Applications include microscopic sensors and optical display technologies. Materials used to construct MEMS devices include silicon (as here) and also polymers such as plastics. Photographed at the Federal Polytechnic School of Lausanne (FPSL), Switzerland.

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