MEMS production, silicon plate

MEMS production, silicon plate

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Caption: MEMS production. Equipment being used in the manufacture of MEMS (microelectromechanical systems) devices on a silicon plate (purple). MEMS devices are mechanical and electrical devices constructed on a microscopic scale. They often look like their larger-scale counterparts, but need to be designed differently due to increased surface effects such as electrostatics and wetting. Applications include microscopic sensors and optical display technologies. Materials used to construct MEMS devices include silicon (as here) and also polymers such as plastics. Photographed at the Federal Polytechnic School of Lausanne (FPSL), Switzerland.

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