MEMS production

MEMS production

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Credit: COLIN CUTHBERT/SCIENCE PHOTO LIBRARY

Caption: MEMS production. Clean room technician lifting a container of silicon wafers being used to produce MEMS (microelectromechanical systems) devices. The wafers will be placed in a furnace to deposit semiconductor films on their surfaces. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

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