MEMS production, photolithography

Credit: COLIN CUTHBERT/SCIENCE PHOTO LIBRARY

Caption: MEMS production. Clean room technician using a photolithography machine to produce MEMS (microelectromechanical systems) devices. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. This technique (photolithography) involves the use of light to etch the device from a photo-sensitive material. Applications of MEMS devices include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

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