MEMS production, metal evaporation

MEMS production, metal evaporation

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Caption: MEMS production. Inside of a metal evaporation machine that is being used to produce MEMS (microelectromechanical systems) devices. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. This technique involves the use of an electron beam to evaporate metals and deposit them on a substrate, and is called e-beam metal evaporation. Applications of MEMS devices include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

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