MEMS production, quality control

MEMS production, quality control

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Credit: COLIN CUTHBERT/SCIENCE PHOTO LIBRARY

Caption: MEMS production. Clean room technician using a microscope to carry out quality control checks on a silicon wafer of MEMS (microelectromechanical systems) devices. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Due to their small size, MEMS devices have to be handled and checked using microscopes. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

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