MEMS production, furnace processing

MEMS production, furnace processing

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Credit: COLIN CUTHBERT/SCIENCE PHOTO LIBRARY

Caption: MEMS production. Row of silicon wafers entering a furnace during the process of producing MEMS (microelectromechanical systems) devices. The wafers are being placed in the furnace so that they can be thermally oxidised. This helps to fix the structure of the devices deposited and etched on their surfaces. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

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