Magnetron sputtering device for coating CDs & ICs

Magnetron sputtering device for coating CDs & ICs

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Credit: LAWRENCE LIVERMORE NATIONAL LABORATORY/ SCIENCE PHOTO LIBRARY

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Caption: New coating technology. An engineer opening a shutter of a vacuum deposition chamber, to reveal three magnetron sputter sources (glowing blue). Sputtering is an important technique in coating technology. A metal cathode, made from the material with which the target is to be coated, is bombarded with positive ions. Atoms of the cathode are ejected, giving the appearance of evaporation. These free atoms then deposit on any object in the chamber. This sort of device may be used to apply thin metal films to integrated circuits or to compact discs.

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Keywords: coating, coating technology, magnetron, magnetron sputtering, sputtering, vacuum deposition

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