Clean room ventilation apparatus

Clean room ventilation apparatus

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Credit: COLIN CUTHBERT/SCIENCE PHOTO LIBRARY

Caption: Clean room ventilation apparatus. Ventilation pipes being used to maintain and circulate clean air in a clean room facility. Clean room facilities are used in the production of microchips and other solid-state electronics, MEMS (microelectromechanical systems) devices, and other microsystems. They are also used in medical and biological research facilities. In the case of solid-state electronics, the clean rooms are needed to prevent dust and human hair and skin cells landing on, and contaminating, the sensitive devices. Medical and biological clean rooms are designed to prevent workers being infected by viruses and other microbes being studied. These pipes are for a MEMS production facility.

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