MEMS measurement device

MEMS measurement device

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Caption: MEMS measurement device. Electrostatic comb drive actuators designed to measure piezoelectric properties of materials at the microscopic scale. This is an example of a MEMS (microelectromechanical systems) device. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at the National Physical Laboratory, Teddington, UK.

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