MEMS chip

MEMS chip

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Credit: RICHARD KAIL/SCIENCE PHOTO LIBRARY

Caption: MEMS chip. Person holding a MEMS (microelectromechanical systems) device mounted on a CD. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics.

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