Optical profiling of MEMS metamaterial

Optical profiling of MEMS metamaterial

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Caption: Optical profiling of MEMS metamaterial. Optical profilometer test on a MEMS device made from a metamaterial. This device is an integrated nanomechanical thermal transducer designed to increase electromagnetic wave absorption in the THz (terahertz) range. An example of a MEMS (microelectromechanical systems) device, it was developed by researchers from the US Naval Postgraduate School, working at the Center for Nanophase Materials Science at Oak Ridge National Laboratory, USA. Advanced optical profilometry allows mapping of deformations in such structures with sub-nanometre accuracy. This research was published in 2013.

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