PETER MENZEL / SCIENCE PHOTO LIBRARY PETER MENZEL / SCIENCE PHOTO LIBRARY
Light micrograph of a micro- resonator. A micro- resonator is a mechanical resonator structure, made by the same silicon deposition process used in the manufacture of microcircuits. To the left of the frame is the resonant mass, with the tooth- like sensor structure at right. Once motion has been electrically induced, the resonator oscillates much in the same way as a pendulum, only at around 10,000 times per second. The resonant mass of the structure is about 700 nanometres long and about 300 nanometres wide. Such resonators may be used in a variety of motion monitoring devices.
Model release not required. Property release not required.