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Examining microdevice

Examining microdevice

T395/0117

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Credit

COLIN CUTHBERT / SCIENCE PHOTO LIBRARY COLIN CUTHBERT / SCIENCE PHOTO LIBRARY

Caption

Examining microdevices. Sheet of microelectromech- anical systems (MEMS) being examined with an interference microscope (surface profiler). MEMS are electrical and mechanical devices with micrometre-sized parts. They include tiny robots (nanorobots), as well as miniature laboratories (labs on a chip) which can be used in sensors or diagnostic devices. The surface features of this MEMS are being found to a vertical resolution of one tenth of a nanometre using white light interferometry, the pattern caused by the interaction of two waves of white light. Photographed in the Micromechanics Lab of Newcastle University, England.

Release details

Model release not required. Property release not required.

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