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MEMS production, photolithography

MEMS production, photolithography

T395/0332

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Credit

COLIN CUTHBERT / SCIENCE PHOTO LIBRARY COLIN CUTHBERT / SCIENCE PHOTO LIBRARY

Caption

MEMS production. Clean room technicians using photolithography processes to produce MEMS (microelectromechanical systems) devices. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

Release details

Model release available. Property release not required.

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