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MEMS production, plasma etching

MEMS production, plasma etching

T395/0345

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Credit

COLIN CUTHBERT / SCIENCE PHOTO LIBRARY COLIN CUTHBERT / SCIENCE PHOTO LIBRARY

Caption

MEMS production. Clean room technician using a plasma etching machine to produce MEMS (microelectromechanical systems) devices. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. This technique (plasma etching) involves the use of a plasma (super-heated gas) to etch the device from the material used. Applications of MEMS devices include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002.

Release details

Model release available. Property release not required.

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