51.0 MB (7.4 MB compressed)
4878 x 3654 pixels
41.4 x 31.0 cm ⏐ 16.3 x 12.2 in (300dpi)
DAVID SCHARF / SCIENCE PHOTO LIBRARY DAVID SCHARF / SCIENCE PHOTO LIBRARY
MEMS force measurement device. Coloured scanning electron micrograph of a charge-pumped actuation force measurement test structure MEMS (microelectromechanical systems) device. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Magnification: x640, when printed 10 centimetres wide.
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