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Damaged MEMS silicon wafer, SEM

Damaged MEMS silicon wafer, SEM

C016/7096

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Credit

DAVID SCHARF / SCIENCE PHOTO LIBRARY DAVID SCHARF / SCIENCE PHOTO LIBRARY

Caption

Damaged MEMS silicon wafer. Coloured scanning electron micrograph of a chipped MEMS (microelectromechanical systems) silicon wafer. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Magnification: x443, when printed 10 centimetres wide.

Release details

Model release not required. Property release not required.

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