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MEMS micro hot-plate, SEM

MEMS micro hot-plate, SEM

C016/7097

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Credit

DAVID SCHARF / SCIENCE PHOTO LIBRARY DAVID SCHARF / SCIENCE PHOTO LIBRARY

Caption

MEMS micro hot-plate. Coloured scanning electron micrograph of a MEMS (microelectromechanical systems) micro hot-plate heater. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Magnification: x433, when printed 10 centimetres wide.

Release details

Model release not required. Property release not required.

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