IBM RESEARCH / SCIENCE PHOTO LIBRARY IBM RESEARCH / SCIENCE PHOTO LIBRARY
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Nanotechnology Centre, IBM research. IBM scientist Richard Stutz in the clean rooms at the Nanotechnology Centre at IBM Research-Zurich, Switzerland. These facilities include class 100 (ISO 5) to class 10,000 (ISO 7) clean rooms. Processes carried out here include lithography, wet processing, wet chemical etching, thin-film deposition, dry etching, thermal processing, and vapour phase deposition. Other processes include plating, lapping/polishing, dicing and bonding, and polymer waveguide processing. Materials include semiconductors (such as silicon), metals, insulators, polymers, organics and oxides. Photographed in 2011.
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